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Scanning Electron Microscope (SEM) with EDS

High-resolution imaging and elemental analysis of material surfaces.

Overview

The Zeiss Sigma is a field-emission scanning electron microscope with energy dispersive X-ray spectroscopy (EDS). It images surface detail at high magnification and identifies the elements present in a selected area.

Applications

  • Material surface analysis
  • Elemental composition and element mapping (EDS)
  • Fractography
  • Microstructure examination

Technical Specifications

Make
Zeiss
Model
Sigma
Electron source
Schottky thermal field emitter
Accelerating voltage range
0.2 to 30 kV
Current range
4 pA to 20 nA
Variable pressure range
2 – 133 Pa
Detectors
In-lens secondary electron, Everhart-Thornley secondary electron, variable pressure secondary electron, backscattered electron
Resolution at 1 kV / 15 kV
2.8 nm / 1.5 nm
Maximum image size
3072 × 2304 pixels
Sample chamber
Specimens up to 250 mm diameter and 45 mm tall
EDS detector
80 mm² silicon-drift detector

Specifications are as stated in the instrument documentation.

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